Wen-Syang Hsu
Name Wen-Syang Hsu
Email whsu(at)mail.nctu.edu.tw
Office Tel No. 886-3-5712121 Ext.55111
Title Professor
Phone 886-3-5712121 Ext.55111
Office Room 431, Engineering Building 5
Web Page https://sites.google.com/site/whsulab/
Web Page MEMS Laboratory
Laboratory Room 406, Engineering Building 5
Division Design-Manufacturing Engineering, Micro/Nano Engineering
Teaching Area Design-Manufacturing Engineering / Micro/Nano Engineering
Research Expertise Mechanism analysis, Automotive valve trains design, Spring design, MEMS
Country School Name Department Degree Duration
U.S.A. U.C. Berkeley Mechanical Engineering Ph.D. 1989.12 ~ 1992.05
U.S.A. U.C. Berkeley Mechanical Engineering M.S. 1987.08 ~ 1989.12
R.O.C. NCTU Mechanical Engineering B.S. 1981.09 ~ 1985.06
Organization Title Department Job Title Duration
NCTU Office of International Affairs Chairman 2016.01 ~ Up to today
NCTU Mechanical Engineering Professor and Chairman 2012.08 ~ 2014.07
NCTU Mechanical Engineering Professor and Vice Chairman 2010.08 ~ 2012.07
NCTU Mechanical Engineering Professor 1999.08 ~ Up to today
NCTU Division of External Affairs of Secretariat Office Chief 1996.11 ~ 1998.07
NCTU Mechanical Engineering Associate Professor 1992.08 ~ 1999.07
Ford Lio Ho Motor Company Ltd Manufacturing & Plant engineering Engineer 1990.06 ~ 1990.08
U.C. Berkeley Mechanical Engineering Research Assistant 1988.08 ~ 1992.06
R.O.C. Military Academy Mechanical Engineering Instructor 1985.10 ~ 1987.05
Year Project Title Participator Job Title Period Unit
2014 The study of compensative structures assisted convex and concave structure high-aspect-ratio etching for mirco-grating application by Inductively Coupled Plasma-Reactive Ion Etch (ICP-RIE) Wensyang Hsu Principle investigator 2014.08 ~ 2015.07 Ministry of science and technology
2013 SNP Lab-on-Chip Wensyang Hsu Principle investigator 2013.01 ~ 2014.12 Panasonic Corporation
2012 Development of energy harvesters and passive wireless sensors by smart materials and MEMS Wensyang Hsu Principle investigator 2012.08 ~ 2015.07 Ministry of science and technology
2012 Improvement of magnetic targeting devices with drilling test for distal locking in intramedullary nailing surgery Wensyang Hsu Principle investigator 2012.01 ~ 2014.12 National Taiwan University Hospital Hsin-Chu Branch
2011 The development of gravity-driven electronic intravenous infusion device Wensyang Hsu Principle investigator 2011.01 ~ 2011.12 Hsinchu General Hospital
2011 Innovative long nano atomic force probe microscopy analysis set in biomimetic asymmetric double-layer lipid membrane proton transmission pyrophosphatase enzyme that real-time dynamic characteristics - the oil-coated droplets of water glue preparation of m Wen-Syang Hsu Principle investigator 2011.01 ~ 2014.01 National Science Council
2011 Nano National academic and research cooperation program - micro fluid Reproductive Medicine - Bionic, testing and tissue engineering Wen-Syang Hsu Principle investigator 2011.01 ~ 2014.01 National Science Council
2011 Polymer as inductively coupled plasma reactive ion etching sidewall protection layer to produce single crystal silicon suspended the development of micro-structure, process platform Wen-Syang Hsu Principle investigator 2011.01 ~ 2012.01 National Science Council
2010 The development of the polysilicon micro-inertial sensors Wen-Syang Hsu Principle investigator 2010.01 ~ 2012.01 Industry commissioned by the cooperation program
2010 R & D of high-G touch fried switch Wen-Syang Hsu Principle investigator 2010.01 ~ 2010.01 Chung-Shan Institute of Science & Technology
2009 Science-Based Industrial Park, strengthening the economy sophisticated research program - the single-chip polysilicon capacitive micromachined accelerometer Wen-Syang Hsu Principle investigator 2009.01 ~ 2010.01 National Science Council
2008 The coefficient of thermal expansion of the micro-structure of metal nanoparticles and fatigue characteristics of plating production Wen-Syang Hsu Principle investigator 2008.09 ~ 2011.07 National Science Council
2008 Production of the vertical comb actuator to the light-sensitive polymer materials Wen-Syang Hsu Principle investigator 2008.08 ~ 2010.07 National Science Council
2006 Micro-actuator assembly of micro resistance welding in the three-dimensional micro-components Wen-Syang Hsu Principle investigator 2006.01 ~ 2008.01 National Science Council
2005 Fabrication and Characterization of Metal-based Microstructures with Nano Particles Wensyang Hsu Principle investigator 2005.08 ~ 2006.07 National Science Council
2004 The new high efficiency caused by micro-actuator and its application in micro-electromechanical systems research Wen-Syang Hsu Principle investigator 2004.01 ~ 2007.01 National Research Council, Canada - National Science Council, R.O.C.
Year Paper Title Authors Journal Title Issue.No
2018 Paper List of Wensyang Hsu Prof. on MOST website" href="/en/per/per1/journal/Paper-List-of-Wensyang-Hsu-Prof-on-MOST-website-84794843" target="_blank">Paper List of Wensyang Hsu Prof. on MOST website
2017 An EWOD-based micro diluter with high flexibility on dilution ratio Wang, Y.-B., Huang, J.-H., Lee, M.-S., Huang, C.-Y., Huang, C.-S., Yamashita, I., Tu, Y.-Y., and Hsu, W. Microsystem Technologies
2017 Droplet-based label-free detection system based on guided-mode resonance and electrowetting-on-dielectric for concentration measurement Wang, Y.-B., Su, L.-Y., Fu, C.-S., Huang, C.-S., and Hsu, W. Japanese Journal of Applied Physics
2016 A resettable, wireless and passive fall-down recorder using a magnetic droplet with an LC circuit Huang, C.-Y., Sun, P., Lee, M.-S., Wu, S.-Y., Shieh, Y.-C., and Hsu, W. IEEE Sensors Journal
2016 Womb-on-a-Chip Biomimetic System for Improved Embryo Culture and Development Chang, K.-W., Chang, P.-Y., Huang, H.-Y., Li, C.-J., Tien, C.-H., Yao, D.-J., Fan, S.-K., Hsu, W., and Liu, C.-H. Sensors & Actuators: B. Chemical
2016 A highly efficient bead extraction technique with low bead number for digital microfluidic immunoassay Huang, C.-Y., Tsai, P.-Y., Lee, I-C., Hsu, H.-Y., Huang, H.-Y., Fan, S.-K., Yao, D.-J., Liu, C.-H., and Hsu, W. Biomicrofluidics
2016 A rapid fatigue test method on micro structures for high cycle fatigue Shieh, Y.-C., Lin, H.-Y., Hsu, W., and Lin, Y.-H. IEEE Transactions on Device and Materials Reliability
2015 AMPFLUID: aggregation magnified post-assay fluorescence for ultrasensitive immunodetection on digital microfluidics Huang, C.-Y., Shih, P.-H., Tsai, P.-Y., Lee, I-C., Hsu, H.-Y., Huang, H.-Y., Fan, S.-K., and Hsu, W. Proceedings of the IEEE
2015 Development of a High Efficiency In-Line Tube Fan Using CFD Yen, H.-C., Hsu, W., Huang, J.-M., and Lu, C.-W. International Journal of Turbo and Jet Engines
2015 An Implantable Drug-delivery System on a Chip Lee, M.-S., Yao, D.-J., and Hsu, W. Current Topics in Medicinal Chemistry
2015 Digital Microfluidic Dynamic Culture of Mammalian Embryos on an Electrowetting on Dielectric (EWOD) Chip Huang, H.-Y., Shen, H.-H., Tien, C.-H., Li, C.-J., Fan, S.-K., Liu, C.-H., Hsu, W., and Yao, D.-J. PLoS ONE
2015 3D-printed microelectronics for integrated circuitry and passive wireless sensors Wu, S.-Y., Yang, C., Hsu, W., and Lin, L. Microsystems and Nanoengineering
2014 A Simulation Model on Photoresist SU-8 Thickness after Development under Partial Exposure with Reflection Effect Huang, Y.-T. and Hsu, W. Japanese Journal of Applied Physics
2014 A wirelessly readable and resettable shock recorder through the integration of LC circuits and MEMS devices Wu, S.-Y., Hung, C.-Y., and Hsu, W. Smart Materials and Structures
2014 An Analytical Model for Calculating the Pull-in Voltage of Micro Cantilever Beams Subjected to Tilted and Curled Effects Huang, Y.-T., Chen, H.-L., and Hsu, W. Microelectronic Engineering
2014 Electromagnetic/Magnetic-Coupled Targeting System for Screw-Hole Locating in Intramedullary Interlocking-Nail Surgery Wong, T.-H., Chung, T.-K., Liu, T.-W., Chu, H.-J., Hsu, W., Yeh, P.-C., Lee, C.-C., Lee, M.-S., and Yang, Y.-S. IEEE Sensors Journal
2014 Wireless EWOD/DEP chips powered and controlled through LC circuits and frequency modulation Wu, S.-Y. and Hsu, W. Lab on a Chip
2014 Fabricating embedded SU-8 microstructures with asymmetric inside cross section by double-side multiple partial exposure method Huang, Y.-T and Hsu, W. Microelectronic Engineering
2014 Performance enhancement of the in-line fan equipped with the guiding vane and the tail body Yen, H.-C., Hsu, W., and Lin, S.-C. Journal of Advances in Mechanical Engineering
2013 Soldering of solution-processed organic vertical transistor and lightemitting diode on separate glass substrates by tin micro-balls Lin, Y.-H., Chang, Y.-F., Meng, H.-F., Zan, H.-W., Hsu, W., and Chen, C.-H. Organic Electronics
2013 Design and characterization of LC strain sensors with novel inductor for sensitivity enhancement Wu, S.-Y. and Hsu, W. Smart Materials and Structures 10
2012 Electroplated Ni-CNT Nanocomposite for Micromechanical Resonator Applications Lee, Y.-C., Li, M.-H., Cheng, Y.-T., Hsu, W., and Li, S.-S. IEEE Electron Device Letters
2012 Stress Gradient Modification of the Electroplated Ni-Diamond Nanocomposite for MEMS Fabrication Lee, Y.-C., Cheng, Y.-T. and Hsu, W. Journal of The Electrochemical Society 5
2012 Polymer as the protecting passivation layer in fabricating suspended SCS structures at both anisotropic and isotropic etching Lin, Y.-H. and Hsu, W. J. Micromech. Microeng. 22
2011 Improved model of rectangular scratch drive actuator Chen, S., Chang, C., and Hsu, W. J. Micro/Nanolith, MEMS, MOEMS 10
2011 Droplet-on-a-Wristband: Chip-to-Chip Digital Microfluidic Interfaces between Replaceable and Flexible Electrowetting Modules Fan, S.-K., Yang, H., and Hsu, W. Lab on A Chip 2
2010 Optimization of an optical disk manufacturing process for polymer microfluidic substrates by using the design of experiment methodology Wu, C.H., Hsu, W., Fan, K.W., Lin, Y.L., and Lin Y.C. J. Micro/Nanolith, MEMS, MOEMS 3
2010 The Investigation of Nano-Roughening Effect on the Reliability Enhancement of Adhesive Bond for NEMS Manufacture Application Yang, C.-Y., Cheng, Y.-T. and Hsu, W., IEEE Trans. on Adv. Packaging 2
2010 Output Force Enhancement of Scratch Drive Actuator in Low-Voltage Region by Using Flexible Joint Chen, S., Chang, C., and Hsu, W. Sensors and Transducers 4
2009 Three-dimensional micro assembly of a hinged nickel micro device by magnetic lifting and micro resistance welding Chang, C.-W. and Hsu, W. J. Micromech. Microeng. 10
2009 Experimental investigations and characterization of micro resistance welding with an electro-thermal actuator Chang, C.-W., Yeh, C.-C., and Hsu, W. J. Micromech. Microeng. 2
2009 Investigation of Ni-based Thermal Bimaterial Structure for Sensor and Actuator Application Huang, C.-S., Cheng, Y.-T., Chung, J., and Hsu, W. Sensors and Actuators :A 149
2008 Fabrication of a polymer-based torsional vertical comb drive using a double-side partial exposure method Chung, J.W. and Hsu, W. J. Micromech. Microeng. 3
2008 Effectiveness of Si thin buffer layer for selective SiGe epitaxial growth in recessed source and drain for pMOS Cheng, P.L., Liao, C.I., Chien, C.C., Yang, C.L., Ting, S.F., Jeng, L.S., Huang, C.T., Cheng, Osbert, Tzou, S.F., and Hsu, W. Materials Chemistry and Physics 2-3
2007 Enhancement on forming complex three dimensional microstructures by a double-side multiple partial exposure method Chung, Junwei and Hsu, Wensyang Journal of Vacuum Science and Technology B, and selected in the Virtual Journal of Nanoscale Science & Technology, October Issue, 2007 1671
2007 Asymmetric Electrowetting - Moving Droplets by a Square Wave Fan, S.-K., Yang, H., Wang, T.-T., and Hsu, W Lab on A Chip 7
2007 Design and fabrication of polymer microfludic substrates using the optical disc process Wu, C.-H., Chen, C.-H., Fan, K.-W., Hsu, W. and Lin, Y.-C. Sensors and Actuators: A 1-2
2006 Performance Characterization of In-plane Electro-Thermally Driven Linear Microactuators Yongjun Lai, Evgueni V. Bordatchev, Suwas K. Nikumb, Wensyang Hsu Journal of Intelligent Material Systems and Structures 10
2006 A self-aligned process between the nano-aperture and solid immersion lens Hung-Lung Hsu, Yu-Ru Chang, Yi Chiu, Yu-Hsin Lin and Wensyang Hsu Journal of Micromechanics and Microengineering
2006 Ni-CNTs Nanocomposite for Robust MEMS Fabrication Li-Nuan Tsai, Yu-Ting Cheng, Wensyang Hsu, and Weileun Fang J. Vac. Sci. Tech. B.
2006 Performance Improvement of an Electrothermal Microactuator Fabricated Using Ni-Diamond Nanocomposite Li-Nuan Tsai, Guang-Ren Shen, Yu-Ting Cheng and Wensyang Hsu IEEE/ASME Journal of Micro Electro Mechanical Systems 1
2006 A Wafer-Level Hermetic Encapsulation for MEMS Manufacture Application Zhi-Hao Liang, Yu-Ting Cheng, Wensyang Hsu, Yuh-Wen Lee IEEE Trans. on Adv. Packaging 3
2006 Design and Fabrication of an Electrothermal Microactuator for Multi-level Conveying Chien-Tai Wu, Wensyang Hsu Journal of Microsystem Technologies 4
2006 Design and Characterization of Electrothermal Monolithic Long-Stretch Micro Drive with High Output Efficiency W. Hsu IEEE/ASME Journal of Micro Electro Mechanical Systems 4
2006 Effective surface treatments for selective epitaxial SiGe growth in locally strained pMOSFETs Cheng, P.L., Liao, C.I., Wu, H.R., Chen, Y.C., Chien, C.C., Yang, C.L., Tzou, S.F., Tang, J., Kodali, R., Washington, L., Cho, Y., Chang, V.C., Fu, T., and Hsu, W. J. of Semiconductor Science and Technology 22
Year Paper Title Authors Conference Name Location
2016 Integration of Photonic Crystal and Electrowetting-on-dielectric Microfluidics for Concentration Measurement Su, L.-Y., Fu, C.-S., Wang, Y.-B., Huang, C.-S., and Hsu, W. Optofluidics 2016 Beijing, China
2015 A Removable Mechanism for Positioning Magnet for Distal Locking in Intramedullary Nailing Surgery Lee, M.-S., Hsu, P.-J., Sun, A., Wong, T.-H., Hsu, W., and Chung, T.-K. IFToMM 2015 Taipei, Taiwan
2015 Investigation of three-dimension bead aggregation effect for optical sensing in digital microfluidics platform Chung, Y.-H., Huang, C.-Y., Tsai, P.-Y., Hsu, H.-Y., and Hsu, W. Optofluidics 2015 Taipei, Taiwan
2015 A novel inclined lipid bilayer formation based on DIB method Wang, Y.-B., Siao, M.-H., Huang, C.-Y., and Hsu, W. Optofluidics 2015 Taipei, Taiwan
2015 Embryo lab chip taking advantage of microfluidics and cell co-culturing Liu, C.-H., Chang, K.-W., Chang, P.-Y., Sung, Y.-J., Huang, H.-Y., Yao, D.-J., Fan, S.-K., Hsu, W., and Li, C.-J. IEEE Transducers 2015 Alaska, USA
2015 3D Printed RF Passive Components by Liquid Metal Filling Yang, C., Wu, S.-Y., Glick, C., Choi, Y., Hsu, W., and Lin, L. IEEE MEMS 2015 Estoril, Portugal
2012 Signal Enhancement by Particle Concentration Using Dielectrophoresis in an Electrowetting-driven Droplet Chuo, T.-M., Shih, P.-H., Hsu, W., Huang, C.-Y., Huang, Y.-S., Chen, Y.-T., and Fan, S.-K. IEEE NANOMED 2012 Bangkok, Thailand
2012 Fabrication of Deep Lateral Single-Crystal-Silicon Blaze Micro-grating by Inductively-Coupled-Plasma Reactive Ion Etch, Lin, Y. H., Weng, C. J., Su, C. Y. Su, Hsu, W. IEEE-NEMS 2012
2012 Design and Fabrication of an Electrothermal Microactuator for Multi-level Conveying Chuo Tsung-Min, Fan, Shih-Kang, Hsu Wensyang IEEE-NEMS 2012
2011 Sensitivity Enhancement of LC Sensors with Novel Inductor Design Wu, S.Y. and Hsu, W. IEEE SENSORS 2011
2011 Capillary Electrophoresis in Virtual Microchannel Based on Dielectrophoresis Huang, Cheng-Yeh, Fan, Shih-Kang, Hsu, Wensyang The 15th International Conference on Miniaturized Systems for Chemistry and Life Sciences (MicroTAS 2011)
2011 A Robust Micro Mechanical-latch Shock Switch with Low Contact Resistance Chung, C.H. Ma, R.-P. Ma, Shieh, Y.-C. and Hsu, W. The 16th International Conference on Solid-State Sensors, Actuators and Microsystems (IEEE Transducers’11)
2011 Electroosmotic Flow Control in a Virtual Microchannel Based on Liquid Dielectrophoresis Huang, Cheng-Yeh, Fan, Shih-Kang, Hsu, Wensyang IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE NEMS 2011)
2011 Electroplating Process of Ni-CNTs Nanocomposite for MEMS Resonator Fabrication Lee, Yi-Chia, Cheng, Y. T. and Hsu, Wensyang IEEE MEMS Conference
2010 Output Force Characterization of Scratch Drive Actuators with Flexible Joints Chen, Shawn, Chang, Chiawei, and Hsu, Wensyang 5th Asia-Pacific Conference on Transducers and Micro-Nano Technology (APCOT 2010)
2010 Feasibility Study on Using Polymer as Protecting Material in Fabricating Suspended Single-Crystal-Silicon Microstructures, Lin, Yu-Hsin, and Hsu, Wensyang 5th Asia-Pacific Conference on Transducers and Micro-Nano Technology (APCOT 2010)
2010 A Rapid Fatigue Test Method on Microstructures, Lin, Hsuan-Yu, Lee, Yi-Chia and Hsu Wensyang 5th Asia-Pacific Conference on Transducers and Micro-Nano Technology (APCOT 2010)
2009 Electroosmotic Flow in Dielectrophoresis-Formed Microchannel Hu, Hao-Yu Fan, Shih-Kang Hsu, Wensyang Huang, Cheng-Yeh the 3rd IEEE International Conference on Nano/Molecular Medicine and Engineering
2009 Young’s modulus and fatigue lifetime improvements by diamond size effect on electroplated Ni-diamond nanocomposite Huang, C.S. Cheng, Y.T. Yeh, C.J. Liu, H.K. and Hsu, W. Proceedings of the 15th International Conference on Solid-State Sensors, Actuators and Microsystems (IEEE Transducers 2009)
2008 Connecting interface for modularization of digital microfluidics Yang, H.P. Fan, S.K., and Hsu, W. SPIE Symposium on MOEMS-MEMS
2008 Characterization of microresistance welding with electro-thermal actuator for micro assembly Chang, Chun-Wei and Hsu, W. SPIE Symposium on MOEMS-MEMS
2008 Wristand-like droplet platform by digital microfluidic modulation Yang, H.P. Hsu, W., and Fan, S.K. IEEE MEMS Conference
2008 Fabrication of polymer-based vertical comb drive using a double-side multiple partial exposure method, Chung, Junwei, Lee, Y.C. and Hsu, W. 2008 IEEE MEMS Conference
2007 Transporting and Heating Droplets by AC Electric Fields on a EWOD-Based Parallel Plate Device Wei, Jen-Hung, Hsu, Wensyang, Fan, Shih-Kang IEEE International Conference on Nano/Molecular, Medicine and Engineering (NANOMED)
2007 Reflective electronic-paper display utilizing electric polarized particle chains Chiu, C P, Huang, P W, Fan, S K, Wei, J H, and Hsu, W. Society for Information Display (SID) International Symposium
2007 A Novel Fabrication Method of Microlens Array by Surface Tension and Injection Process Lin Y S and Hsu W Proc. 2nd IEEE Int. Conf. on Nano/Micro Engineered and Molecular Systems
2007 Fabrication of 3D Photoresist Microstructures for the Polymer Vertical Comb Drive Chung J and Hsu W Proc. 2nd IEEE Int. Conf. on Nano/Micro Engineered and Molecular Systems
2007 Realizing Temperature-Controlled Digital Microfluidic Chips with Versatile Microelectrodes Wei J H, Hsu W and Fan S K Proc. 2nd IEEE Int. Conf. on Nano/Micro Engineered and Molecular Systems
2007 Micro Assembly by Micro Resistance Welding with Electro-Thermal Actuators Yeh C C, Chung J, Chang C W and Hsu W Proc. 2nd IEEE Int. Conf. on Nano/Micro Engineered and Molecular Systems
2007 Thermal Bimetallic Microactuators by Ni and Ni-diamond Nanocomposite Huang C S, Chung J, Cheng Y T and Hsu W Proc. 2nd IEEE Int. Conf. on Nano/Micro Engineered and Molecular Systems
2006 Performance Enhancement of Comb Drive Actuator Utilizing Electroplated Nickel-Diamond Nanocomposite Lee, Yi-Chia, Tsai, Li-Nuan, Cheng, Yu-Ting and Hsu, Wensyang the 3rd Asia-Pacific Conference of Transducers and Micro-Nano Technology (APCOT 2006)
2006 Characterization of Electroplated Nickel Films at Different Thickness Chung, J.W., Teng, Y.Y, and Hsu, W. the 3rd Asia-Pacific Conference of Transducers and Micro-Nano Technology (APCOT 2006)
2006 A Bio-compatible Microgripper Operated in Aqueous Environment Chang, C.W. and Hsu, W. the 3rd Asia-Pacific Conference of Transducers and Micro-Nano Technology (APCOT 2006)
2006 Design and Fabrication of Polymer Microfluidic Platform by Optical Disc Process Wu, C.H., Chen, C.H., Fan, K.W., Hsu, W., and Lin, Y.C. the 3rd Asia-Pacific Conference of Transducers and Micro-Nano Technology (APCOT 2006)
2006 A novel self-aligned process between the nano-aperture and solid immersion lens Hsu, H.L., Chang, Y.R., Lin, Y.H., and Hsu, W. the 3rd Asia-Pacific Conference of Transducers and Micro-Nano Technology (APCOT 2006)
2006 Nano-Roughening for Reliable N/MEMS Manufacture Yang, Chia-Yeh, Cheng, Y. T., and Hsu, W. IEEE-NEMS 2006
2005 3D Droplet Transportation by EWOD Actuations on Flexible Polymer Films Yang, H., Fan, S.-K. and Hsu, W. ASME IMECE 2005 Orlando, USA