Year 2006
Authors Wen-Syang Hsu ,Cheng, P.L., Liao, C.I., Wu, H.R., Chen, Y.C., Chien, C.C., Yang, C.L., Tzou, S.F., Tang, J., Kodali, R., Washington, L., Cho, Y., Chang, V.C., Fu, T., and Hsu, W.
Paper Title Effective surface treatments for selective epitaxial SiGe growth in locally strained pMOSFETs
Journal Title J. of Semiconductor Science and Technology
Issue.No 22
Page(s) 140-143
Level Type SCI,EI
Total Pages 4
Language English