Year	2012
Authors	Wen-Syang Hsu ,Lin, Y. H., Weng, C. J., Su, C. Y. Su, Hsu, W.
Paper Title	Fabrication of Deep Lateral Single-Crystal-Silicon Blaze Micro-grating by Inductively-Coupled-Plasma Reactive Ion Etch,
Conference Name	IEEE-NEMS 2012
Peroid	Mar. 05-08, 2012