Year 2007
Authors Wen-Syang Hsu ,Chung, Junwei and Hsu, Wensyang
Paper Title Enhancement on forming complex three dimensional microstructures by a double-side multiple partial exposure method
Journal Title Journal of Vacuum Science and Technology B, and selected in the Virtual Journal of Nanoscale Science & Technology, October Issue, 2007
Vol.No 25
Issue.No 1671
Level Type SCI,EI
Language English