Year | 2007 |
---|---|
Authors | Wen-Syang Hsu ,Chung, Junwei and Hsu, Wensyang |
Paper Title | Enhancement on forming complex three dimensional microstructures by a double-side multiple partial exposure method |
Journal Title | Journal of Vacuum Science and Technology B, and selected in the Virtual Journal of Nanoscale Science & Technology, October Issue, 2007 |
Vol.No | 25 |
Issue.No | 1671 |
Level Type | SCI,EI |
Language | English |