Year	2007
Authors	Wen-Syang Hsu ,Chung, Junwei and Hsu, Wensyang
Paper Title	Enhancement on forming complex three dimensional microstructures by a double-side multiple partial exposure method
Journal Title	Journal of Vacuum Science and Technology B, and selected in the Virtual Journal of Nanoscale Science & Technology, October Issue, 2007
Vol.No	25
Issue.No	1671
Level Type	SCI,EI
Language	English