年度	2007
全部作者	徐文祥,Chung, Junwei and Hsu, Wensyang
論文名稱	Enhancement on forming complex three dimensional microstructures by a double-side multiple partial exposure method
期刊名稱	Journal of Vacuum Science and Technology B, and selected in the Virtual Journal of Nanoscale Science & Technology, October Issue, 2007
卷數	25
期數	1671
期刊等級	SCI,EI
語言	英文