Year	2014
Authors	Wen-Syang Hsu ,Huang, Y.-T., Chen, H.-L., and Hsu, W.
Paper Title	An Analytical Model for Calculating the Pull-in Voltage of Micro Cantilever Beams Subjected to Tilted and Curled Effects
Journal Title	Microelectronic Engineering
Vol.No	125
Page(s)	73-77
Language	English