NYCU ME| Year | 2007 |
|---|---|
| Authors | Wen-Syang Hsu /Chung J and Hsu W |
| Paper Title | Fabrication of 3D Photoresist Microstructures for the Polymer Vertical Comb Drive |
| Conference Name | Proc. 2nd IEEE Int. Conf. on Nano/Micro Engineered and Molecular Systems |
Login NCTU ME
| Year | 2007 |
|---|---|
| Authors | Wen-Syang Hsu /Chung J and Hsu W |
| Paper Title | Fabrication of 3D Photoresist Microstructures for the Polymer Vertical Comb Drive |
| Conference Name | Proc. 2nd IEEE Int. Conf. on Nano/Micro Engineered and Molecular Systems |