Year	2014
Authors	Wen-Syang Hsu ,Huang, Y.-T. and Hsu, W.
Paper Title	A Simulation Model on Photoresist SU-8 Thickness after Development under Partial Exposure with Reflection Effect
Journal Title	Japanese Journal of Applied Physics
Vol.No	53
Page(s)	036505-
Date of Publication	2014-01-01
Language	English