Year 2008
Authors Wen-Syang Hsu ,Cheng, P.L., Liao, C.I., Chien, C.C., Yang, C.L., Ting, S.F., Jeng, L.S., Huang, C.T., Cheng, Osbert, Tzou, S.F., and Hsu, W.
Paper Title Effectiveness of Si thin buffer layer for selective SiGe epitaxial growth in recessed source and drain for pMOS
Journal Title Materials Chemistry and Physics
Vol.No 107
Issue.No 2-3
Page(s) 471-475
Level Type SCI
Total Pages 5
Language English