Year	2006
Authors	Wen-Syang Hsu ,Li-Nuan Tsai, Yu-Ting Cheng, Wensyang Hsu, and Weileun Fang
Paper Title	Ni-CNTs Nanocomposite for Robust MEMS Fabrication
Journal Title	J. Vac. Sci. Tech. B.
Vol.No	24
Page(s)	205-210
Level Type	SCI,EI
Total Pages	6
Language	Chinese