Year	2010
Authors	Wen-Syang Hsu ,Lin, Yu-Hsin, and Hsu, Wensyang
Paper Title	Feasibility Study on Using Polymer as Protecting Material in Fabricating Suspended Single-Crystal-Silicon Microstructures,
Conference Name	5th Asia-Pacific Conference on Transducers and Micro-Nano Technology (APCOT 2010)
Peroid	Jul. 06-09, 2010