年度	2010
全部作者	徐文祥,Lin, Yu-Hsin, and Hsu, Wensyang
論文名稱	Feasibility Study on Using Polymer as Protecting Material in Fabricating Suspended Single-Crystal-Silicon Microstructures,
會議名稱	5th Asia-Pacific Conference on Transducers and Micro-Nano Technology (APCOT 2010)
地點	Perth, West Australia
會議期間	2010/07/06-09