Year	2006
Authors	Wen-Syang Hsu ,Hung-Lung Hsu, Yu-Ru Chang, Yi Chiu, Yu-Hsin Lin and Wensyang Hsu
Paper Title	A self-aligned process between the nano-aperture and solid immersion lens
Journal Title	Journal of Micromechanics and Microengineering
Vol.No	16
Page(s)	2632-2638
Level Type	SCI,EI
Total Pages	7
Language	Chinese