NYCU ME| Year | 2008 |
|---|---|
| Authors | Wen-Syang Hsu ,Chung, J.W. and Hsu, W. |
| Paper Title | Fabrication of a polymer-based torsional vertical comb drive using a double-side partial exposure method |
| Journal Title | J. Micromech. Microeng. |
| Vol.No | 18 |
| Issue.No | 3 |
| Level Type | SCI,EI |
| Language | English |
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