Year	2008
Authors	Wen-Syang Hsu ,Chung, J.W. and Hsu, W.
Paper Title	Fabrication of a polymer-based torsional vertical comb drive using a double-side partial exposure method
Journal Title	J. Micromech. Microeng.
Vol.No	18
Issue.No	3
Level Type	SCI,EI
Language	English