Year	2012
Authors	Wen-Syang Hsu ,Lin, Y.-H. and Hsu, W.
Paper Title	Polymer as the protecting passivation layer in fabricating suspended SCS structures at both anisotropic and isotropic etching
Journal Title	J. Micromech. Microeng.
Issue.No	22
Level Type	SCI,EI
Date of Publication	2012-03-01
Language	English