Year | 2006 |
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Authors | Wen-Syang Hsu ,Hsu, H.L., Chang, Y.R., Lin, Y.H., and Hsu, W. |
Paper Title | A novel self-aligned process between the nano-aperture and solid immersion lens |
Conference Name | the 3rd Asia-Pacific Conference of Transducers and Micro-Nano Technology (APCOT 2006) |
Peroid | Jun. 25-28, 2006 |