年度	2012
全部作者	吳宗信,C.-T. Hung, K.-M. Lin, B.-R. Gu, J.-S. Wu* and G. C. Cheng
論文名稱	Simulation of Large-scale Plasma Enhanced Chemical Vapor Deposition Process for Amorphous Silicon by a Very High-Frequency Power Source Using Parallel Fluid Modeling
會議名稱	The joint meeting of 11th APCPST (Asia Pacific Conference on Plasma Science and Technology) and 25th SPSM (Symposium on Plasma Science for Materials)
地點	Kyoto, Japan
會議期間	2012/10/02-05