Year	2012
Authors	Jong-Shinn Wu ,C.-T. Hung, K.-M. Lin, B.-R. Gu, J.-S. Wu* and G. C. Cheng
Paper Title	Simulation of Large-scale Plasma Enhanced Chemical Vapor Deposition Process for Amorphous Silicon by a Very High-Frequency Power Source Using Parallel Fluid Modeling
Conference Name	The joint meeting of 11th APCPST (Asia Pacific Conference on Plasma Science and Technology) and 25th SPSM (Symposium on Plasma Science for Materials)
Location	Kyoto, Japan
Peroid	Oct. 02-05, 2012