Year 2012
Authors Jong-Shinn Wu ,C.-T. Hung, K.-M. Lin, B.-R. Gu, J.-S. Wu* and G. C. Cheng
Paper Title Simulation of Large-scale Plasma Enhanced Chemical Vapor Deposition Process for Amorphous Silicon by a Very High-Frequency Power Source Using Parallel Fluid Modeling
Conference Name The joint meeting of 11th APCPST (Asia Pacific Conference on Plasma Science and Technology) and 25th SPSM (Symposium on Plasma Science for Materials)
Location Kyoto, Japan
Peroid Oct. 02-05, 2012