年度 | 2009 |
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全部作者 | 吳宗信,S.-Y. Jou, C.-T. Hung1, Y.-M. Chiu, J.-S. Wu* and B.-Y. Wei |
論文名稱 | Simulation of Excimer Ultraviolet (EUV) Emission from a Xenon Excimer Ultraviolet Lamp Using Pulsed Voltage Power |
會議名稱 | Sixth Asia-Pacific International Symposium on the Basic and Application of Plasma Technology (APSPT-6) |
地點 | Hsinchu, Taiwan |
會議期間 | 2009/12/14-16 |