Year | 2009 |
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Authors | Jong-Shinn Wu ,S.-Y. Jou, C.-T. Hung1, Y.-M. Chiu, J.-S. Wu* and B.-Y. Wei |
Paper Title | Simulation of Excimer Ultraviolet (EUV) Emission from a Xenon Excimer Ultraviolet Lamp Using Pulsed Voltage Power |
Conference Name | Sixth Asia-Pacific International Symposium on the Basic and Application of Plasma Technology (APSPT-6) |
Peroid | Dec. 14-16, 2009 |