年度	2013
全部作者	李安謙,An-Chen Lee, Tzu-Wei Kuo and Wen-Thong Chang
論文名稱	Performance Assessment of Run-to-Run Mixed Product Control Schemes for Overlay Lithography Processes
會議名稱	International conference on Computer Networks, E-Learning and Information Technology
地點	Bangkok, Thailand
會議期間	2013/08/20-21
參考連結	http://www.ijitcs.com/volume%2011_No_1/Chen.pdf