年度	2009
全部作者	陳宗麟,C.-Y. Tsai, T.-L. Chen, and C.-W. Liu
論文名稱	"Design and Fabrication of the MEMS Logic Gate Through a Novel Metal Contact Process,"
會議名稱	Proceedings of 35th International Conference on Micro & Nano Engineering,
地點	Ghent, Belgium
會議期間	2009/09/28-10/01