Year	2009
Authors	Tsung-Lin Chen ,C.-Y. Tsai, T.-L. Chen, and C.-W. Liu
Paper Title	"Design and Fabrication of the MEMS Logic Gate Through a Novel Metal Contact Process,"
Conference Name	Proceedings of 35th International Conference on Micro & Nano Engineering,
Location	Ghent, Belgium
Peroid	Sep. 28-Oct. 01, 2009