年度	2009
全部作者	陳宗麟,C.-Y. Tsai, J.-J. Wang, T.-L. Chen, C.-F. Lin, H.-H. Liao, and Y.-Z. Juang,
論文名稱	"A COMS Micromachined Resonant Sensor with Thermal Actuation and Piezoresistive Sensing,"
會議名稱	Proceedings of 35th International Conference on Micro & Nano Engineering,
地點	Ghent, Belgium
會議期間	2009/09/28-10/01