Year	2009
Authors	Tsung-Lin Chen ,C.-Y. Tsai, J.-J. Wang, T.-L. Chen, C.-F. Lin, H.-H. Liao, and Y.-Z. Juang,
Paper Title	"A COMS Micromachined Resonant Sensor with Thermal Actuation and Piezoresistive Sensing,"
Conference Name	Proceedings of 35th International Conference on Micro & Nano Engineering
Location	Ghent, Belgium
Peroid	Sep. 28-Oct. 01, 2009