Year	2011
Authors	Jong-Shinn Wu ,C.-T. Hung, K.-M. Lin, Y.-M. Chiu, F.-N. Hwang, and J.-S. Wu*
Paper Title	Parallel Fluid Modeling of Plasma-Enhanced Chemical Vapor Deposition for Amorphous Silicon (a-Si) Thin Film Growth
Conference Name	18th Computational Fluid Dynamics Conference in Taiwan
Peroid	Aug. 03-05, 2011