Year 2012
Authors Yao-Hsien Liu ,Tseng, L.W., Wang, C.S., Liu, Y.H., Wang, C.C., Huang, C.Y., Chen, C.C., Lin, K.L.
Paper Title Investigation of Substrate Rotation on the Flow Field in a Chemical Vapor Deposition Chamber Using Particle Image Velocimetry,
Conference Name 24th International Cryogenic Engineering Conference
Location Fukuoka, Japan
Peroid May. 14-18, 2012