Year 2013
Authors Yao-Hsien Liu ,Lai, K.F., Liu, Y.H., Huang, C.H., and Wang, C.C.
Paper Title Flow Patterns in a Multiple Impinging Jets CVD Reactor with a Rotating Substrate
Conference Name The 19th American Conference on Crystal Growth and Epitaxy
Location Keystone, Colorado, USA
Peroid Jul. 21-26, 2013
Paper Type Poster Report,Poster Display
Author Type Corresponding Author
Number Of Authors 4
Language English