Year	2013
Authors	Yao-Hsien Liu ,Lai, K.F., Liu, Y.H., Huang, C.H., and Wang, C.C.
Paper Title	Flow Patterns in a Multiple Impinging Jets CVD Reactor with a Rotating Substrate
Conference Name	The 19th American Conference on Crystal Growth and Epitaxy
Location	Keystone, Colorado, USA
Peroid	Jul. 21-26, 2013
Paper Type	Poster Report,Poster Display
Author Type	Corresponding Author
Number Of Authors	4
Language	English