Year | 2007 |
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Authors | Jong-Shinn Wu ,H.M. Cave, J.-C. Huang, J.-S. Wu, S.P. Krumdieck, K.-C. Tseng, M.C. Jermy, M. Lebedev, K.-W. Cheng and Y.-S. Chen |
Paper Title | Flow Field Modelling of Pulsed Pressure Chemical Vapour Deposition |
Conference Name | Sixteenth European Conference on Chemical Vapor Deposition |
Location | Den Haag (Scheveningen), The Netherlands |
Peroid | Sep. 16-21, 2007 |