Year 2007
Authors Jong-Shinn Wu ,H.M. Cave, J.-C. Huang, J.-S. Wu, S.P. Krumdieck, K.-C. Tseng, M.C. Jermy, M. Lebedev, K.-W. Cheng and Y.-S. Chen
Paper Title Flow Field Modelling of Pulsed Pressure Chemical Vapour Deposition
Conference Name Sixteenth European Conference on Chemical Vapor Deposition
Location Den Haag (Scheveningen), The Netherlands
Peroid Sep. 16-21, 2007