Year	2019
Authors	Tien-Kan (TK) Chung ,Hao Duan, and Tien-Kan Chung*
Paper Title	A Novel Cross-Linked Cantilever Based Piezoelectric Three-Axis MEMS Magnetic Sensor Fabricated By Multiple Wet Etching Processes (Open Poster)
Conference Name	32nd IEEE International Conference on Micro Electro Mechanical Systems (IEEE MEMS)
Location	Seoul, Korea
Peroid	Jan. 27-31, 2019
Paper Type	Poster Report,Poster Display
Paper Level	EI
Sponsor	IEEE
Author Type	Corresponding Author
Number Of Authors	2
Date of Publication	2019-01-30
Language	English