Year 2019
Authors Tien-Kan (TK) Chung ,Hao Duan, and Tien-Kan Chung*
Paper Title A Novel Cross-Linked Cantilever Based Piezoelectric Three-Axis MEMS Magnetic Sensor Fabricated By Multiple Wet Etching Processes (Open Poster)
Conference Name 32nd IEEE International Conference on Micro Electro Mechanical Systems (IEEE MEMS)
Location Seoul, Korea
Peroid Jan. 27-31, 2019
Paper Type Poster Report,Poster Display
Paper Level EI
Sponsor IEEE
Author Type Corresponding Author
Number Of Authors 2
Date of Publication 2019-01-30
Language English