Year | 2010 |
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Authors | Jong-Shinn Wu ,S.-Y. Jou, C.-T. Hung, Y.-M. Chiu, J.-S. Wu*, B.-Y. Wei |
Paper Title | Simulation of Excimer Ultraviolet (EUV) Emission from a Coaxial Xenon Excimer Ultraviolet Lamp Driven by Distorted Bipolar Square Voltages |
Journal Title | Plasma Chemistry and Plasma Processing |
Vol.No | Vol. 30 |
Page(s) | 907-931 |
Level Type | SCI |
Language | English |
Reference URL | http://dx.doi.org/10.1007/s11090-010-9254-3 |