Year 2010
Authors Jong-Shinn Wu ,S.-Y. Jou, C.-T. Hung, Y.-M. Chiu, J.-S. Wu*, B.-Y. Wei
Paper Title Simulation of Excimer Ultraviolet (EUV) Emission from a Coaxial Xenon Excimer Ultraviolet Lamp Driven by Distorted Bipolar Square Voltages
Journal Title Plasma Chemistry and Plasma Processing
Vol.No Vol. 30
Page(s) 907-931
Level Type SCI
Language English
Reference URL