Year	2021
Authors	Tien-Kan (TK) Chung ,Sung-Lin Tsai, Takuya Hoshii, Hitoshi Wakabayashi, Kazuo Tsutsui, Tien-Kan Chung, Edward Y. Chang, Kuniyuki Kakushima*
Paper Title	Room-Temperature Deposition of a Poling-Free Ferroelectric AlScN Film by Reactive Sputtering
Journal Title	Applied Physics Letters (RF: 37/155=23.87%, Physics, Applied, IF: 3.597)
Vol.No	8
Issue.No	118
Page(s)	082902-
Level Type	SCI
Total Pages	4
Date of Publication	2021-02-25
Language	English