Year 2021
Authors Tien-Kan (TK) Chung Sung-Lin Tsai、Takuya Hoshii、Hitoshi Wakabayashi、Kazuo Tsutsui、Tien-Kan Chung、Edward Y. Chang、Kuniyuki Kakushima*
Paper Title Room-Temperature Deposition of a Poling-Free Ferroelectric AlScN Film by Reactive Sputtering
Journal Title Applied Physics Letters (RF: 37/155=23.87%, Physics, Applied, IF: 3.597)
Vol.No 8
Issue.No 118
From 082902
Level Type SCI
Total Pages 4
Date of Publication 2021-02-25
Language English