Year	2010
Authors	Jong-Shinn Wu ,Che-Wei Hsu, Tsung-Chieh Cheng, Wen-Hsien Huang, J.-S. Wu*, Cheng-Chih Cheng, Kai-Wen Cheng, Shih-Chiang Huang
Paper Title	Relation between the plasma characteristics and physical properties of functional zinc oxide thin film prepared by RF sputtering process
Journal Title	Thin Solid Films
Vol.No	Vol. 518
Page(s)	1953-1957
Level Type	SCI
Date of Publication	2010-02-01
Language	English
Reference URL	http://dx.doi.org/10.1016/j.tsf.2009.07.181