Year 2010
Authors Jong-Shinn Wu ,Che-Wei Hsu, Tsung-Chieh Cheng, Wen-Hsien Huang, J.-S. Wu*, Cheng-Chih Cheng, Kai-Wen Cheng, Shih-Chiang Huang
Paper Title Relation between the plasma characteristics and physical properties of functional zinc oxide thin film prepared by RF sputtering process
Journal Title Thin Solid Films
Vol.No Vol. 518
Page(s) 1953-1957
Level Type SCI
Date of Publication 2010-02-01
Language English
Reference URL