Year	2011
Authors	An-Chen Lee ,A. C. Lee, Y. R. Pan and M. T. Hsieh
Paper Title	Output disturbance observer structure applied to Run-to-Run control for semiconductor manufacturing
Journal Title	IEEE Transactions on Semiconductor Manufacturing
Vol.No	24
Issue.No	1
Page(s)	27-43
Level Type	SCI
Date of Publication	2011-02-01
Language	English