Year | 2011 |
---|---|
Authors | An-Chen Lee ,A. C. Lee, Y. R. Pan and M. T. Hsieh |
Paper Title | Output disturbance observer structure applied to Run-to-Run control for semiconductor manufacturing |
Journal Title | IEEE Transactions on Semiconductor Manufacturing |
Vol.No | 24 |
Issue.No | 1 |
Page(s) | 27-43 |
Level Type | SCI |
Date of Publication | 2011-02-01 |
Language | English |
Reference URL | http://ieeexplore.ieee.org/xpls/abs_all.jsp?arnumber=5606204&tag=1 |