Year 2011
Authors An-Chen Lee ,A. C. Lee, Y. R. Pan and M. T. Hsieh
Paper Title Output disturbance observer structure applied to Run-to-Run control for semiconductor manufacturing
Journal Title IEEE Transactions on Semiconductor Manufacturing
Vol.No 24
Issue.No 1
Page(s) 27-43
Level Type SCI
Date of Publication 2011-02-01
Language English
Reference URL