Year 2010
Authors Jong-Shinn Wu ,M.-H. Chiang, K.-C. Liao, I.-M. Lin, C.-C. Lu, H. Y. Huang, C.-L. Kuo, J.-S. Wu*, C.-C. Hsu and S.-H. Chen
Paper Title Effects of Oxygen Addition and Treating Distance on Surface Cleaning of ITO Glass by a Non-Equilibrium Nitrogen Atmospheric-Pressure Jet
Journal Title Plasma Chemistry and Plasma Processing
Vol.No Vol. 30
Issue.No No. 5
Page(s) 553-563
Level Type SCI
Language English
Reference URL