Year | 2010 |
---|---|
Authors | Jong-Shinn Wu ,M.-H. Chiang, K.-C. Liao, I.-M. Lin, C.-C. Lu, H. Y. Huang, C.-L. Kuo, J.-S. Wu*, C.-C. Hsu and S.-H. Chen |
Paper Title | Effects of Oxygen Addition and Treating Distance on Surface Cleaning of ITO Glass by a Non-Equilibrium Nitrogen Atmospheric-Pressure Jet |
Journal Title | Plasma Chemistry and Plasma Processing |
Vol.No | Vol. 30 |
Issue.No | No. 5 |
Page(s) | 553-563 |
Level Type | SCI |
Language | English |
Reference URL | http://dx.doi.org/10.1007/s11090-010-9237-4 |