Year	2012
Authors	An-Chen Lee ,An-Chen Lee, Tzu-Wei Kuo and Chung-Ting Ma
Author Type	First Author,Corresponding Author
Paper Title	Combined Product and Tool Disturbance Estimator for the Mix-Product Process and its Application to the Removal Rate Estimation in CMP Process
Journal Title	International Journal of Precision Engineering and Manufacturing
Vol.No	13
Issue.No	4
Page(s)	471-481
Level Type	SCI
Date of Publication	2012-04-01
Language	English