Year 2012
Authors An-Chen Lee ,An-Chen Lee, Tzu-Wei Kuo and Chung-Ting Ma
Author Type First Author,Corresponding Author
Paper Title Combined Product and Tool Disturbance Estimator for the Mix-Product Process and its Application to the Removal Rate Estimation in CMP Process
Journal Title International Journal of Precision Engineering and Manufacturing
Vol.No 13
Issue.No 4
Page(s) 471-481
Level Type SCI
Date of Publication 2012-04-01
Language English
Reference URL