Year	2011
Authors	An-Chen Lee ,Wei Chin-Chung, Horng Jeng-Haur, Lee An-Chen, and Lin Jen-Fin
Paper Title	Analyses and Experimental Confirmation of Removal Performance of Silicon Oxide Film in the Chemical Mechanical Polishing (CMP) Process with Pattern Geometry of Concentric Groove Pads
Vol.No	270
Page(s)	172-180
Level Type	SCI
Date of Publication	2011-01-01
Language	English
Reference URL	http://www.sciencedirect.com/science/article/pii/S0043164810003911