Year 2011
Authors An-Chen Lee ,Wei Chin-Chung, Horng Jeng-Haur, Lee An-Chen, and Lin Jen-Fin
Paper Title Analyses and Experimental Confirmation of Removal Performance of Silicon Oxide Film in the Chemical Mechanical Polishing (CMP) Process with Pattern Geometry of Concentric Groove Pads
Vol.No 270
Page(s) 172-180
Level Type SCI
Date of Publication 2011-01-01
Language English
Reference URL