Year	2005
Authors	Ray-Quan Hsu ,K. L. Ou,S.Y. Shiou,Ray-Quen Hsu
Paper Title	“Barrier capability of Hf-N Films with Various Nitrogen Concentrations Against Copper Diffusion in Cu/Hf-N/n + -p Junction Diodes ”
Journal Title	Journal of The Electrochemical Society
Vol.No	Vol.152(2)
Page(s)	1-6
Language	Chinese