書報討論 2025 5 1 《第十一週》講者北科能源與冷凍空調工程系胡石政講座教授 National Taipei University of Technology Chair Professor Dr Shih Cheng Hu 講題先進半導體製造工藝的微污染控制重點關注於自動物料搬運系統 Micro Contamination Control for Advanced Semiconductor Manufacturing Processes Focusing on Automatic Material Handling System AMHS