Year 2011
Authors Tien-Kan (TK) Chung ,C. M. Liu, Bruce C.S. Chou, Robert Chin-Fu Tsai, Nick Y.M. Shen, Benior S.F. Chen, Emerson C.W. Cheng, H. C. Tuan; A. Kalnitsky, Sean Cheng, C.-H. Lin, T. K. Chung, K. S. Liu, & Y. S. Liu
Paper Title "MEMS Technology Development and Manufacturing in a CMOS Foundry"
Conference Name 16th International Solid-State Sensors, Actuators, and Microsystems Conference (Transducers'11),