Year	2011
Project Category	Research Projects
Project Title	Polymer as inductively coupled plasma reactive ion etching sidewall protection layer to produce single crystal silicon suspended the development of micro-structure, process platform
Participator	Wen-Syang Hsu
Job Title	Principle investigator
Period	2011.01 ~ 2012.01
Unit	National Science Council
Note	{"en"=>nil, "zh_tw"=>nil}
Language	Chinese