Year	2021
Authors	Tien-Kan (TK) Chung
Paper Title	Sensitivity improvement of magnetic-piezoelectric three-axis MEMS AC magnetic field sensor by thinning moveable-structure of the sensor
Conference Name	2021 International Conference on Smart Sensors (ICSS2021)
Location	Taipei, Taiwan
Paper Type	Conference Papers
Sponsor	Nanotechnology & Microsystem Association, Taiwan
Number Of Authors	4
Language	English