Year	2012
Authors	An-Chen Lee ,An-Chen Lee, Tzu-Wei Kuo and Shang-Wei Chiang
Paper Title	Run-to-Run Mixed Product Overlay Process Control: Using Tool Based Disturbance Estimator (TBDE) Approach
Conference Name	International Conference on Mechanical, Industrial, and Manufacturing Technologies-MIMT 2012
Location	Shenzhen, China
Peroid	Mar. 24-25, 2012
Language	Chinese