Year 2010
Authors Jong-Shinn Wu ,C.-T. Hung, M.-H. Hu, Y.-M. Chiu and J.-S. Wu*
Paper Title Plasma-Enhanced Chemical Vapor Deposition for Amorphous Silicon (a-Si) Thin Film Growth Using Parallel Fluid Modeling
Conference Name 7th International Conference on Flow Dynamics
Peroid Nov. 01-Oct. 03, 2010