Year | 2010 |
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Authors | Jong-Shinn Wu ,C.-T. Hung, M.-H. Hu, Y.-M. Chiu and J.-S. Wu* |
Paper Title | Plasma-Enhanced Chemical Vapor Deposition for Amorphous Silicon (a-Si) Thin Film Growth Using Parallel Fluid Modeling |
Conference Name | 7th International Conference on Flow Dynamics |
Peroid | Nov. 01-Oct. 03, 2010 |