Year	2012
Authors	Jong-Shinn Wu (2026 Retired) ,Y.-M. Chiu, C.-T. Hung and J.-S. Wu*
Paper Title	Parallel fluid modeling of a dome- shape inductively coupled plasma reactor with fluorocarbon precusor
Conference Name	39th IEEE International Conference on Plasma Science (ICOPS2012)
Peroid	Jul. 08-12, 2012