Year	2011
Authors	Jong-Shinn Wu ,Y.-M. Chiu, C.-T. Hung, J.-S. Wu*, F.-N. Hwang
Paper Title	Parallel Fluid Modeling of Silane Gas Discharge in an Inductively Coupled Plasma Source
Conference Name	18th Computational Fluid Dynamics Conference in Taiwan
Peroid	Aug. 03-Jul. 05, 2011