Year | 2011 |
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Authors | Jong-Shinn Wu ,Chieh-Tsan Hung, Kun-Mo Lin, Jong-Shinn Wu* and Jen-Perng Yu |
Paper Title | Parallel Fluid Modeling of Large-Area Plasma Enhanced Chemical Vapor Deposition of Amorphous Silicon Thin Film |
Conference Name | 8th International Conference on Flow Dynamics |
Peroid | Nov. 09, 2011 ~ Nov. 11, 2013 |