Year	2011
Authors	An-Chen Lee ,An-Chen Lee*, Tzu-Wei Kuo and Zeng-Lien Lee
Paper Title	Modified Double EWMA Approach for Mixed Product Run-to-Run CMP Process Control
Conference Name	International Conference on Advanced Design and Manufacturing Engineering-ADME 2011
Peroid	Sep. 16-18, 2011
Reference URL	http://www.scientific.net/AMR.314-316.2504