Year	2015
Authors	Chia-Hung Dylan Tsai/C. D. Tsai* and M. Kaneko
Paper Title	Frequency Responses of On-Chip Pressure Sensor with Different Deformation Chambers
Conference Name	The 26th International Symposium on Micro-Nano Mechatronics and Human Science （MHS2015）
Peroid	Nov. 01, 2015
Paper Type	Conference Papers,Oral Report
Author Type	First Author,Corresponding Author
Date of Publication	2017-01-01
Language	English