Year	2011
Authors	Jong-Shinn Wu ,Y.-M. Chiu, C.-T. Hung, J.-S. Wu*, F.-N. Hwang
Paper Title	Development of Parallel Fluid Modeling for Low-temperature Inductively Coupled Plasma Source in Etching or Deposition Process
Conference Name	8th International Conference on Flow Dynamics
Peroid	Nov. 09-11, 2011